Chemical Corrosive Zirconia Ceramic Quartz Wafer Boat In Semiconductor Chip Processing

Chemical Corrosive Zirconia Ceramic Wafer Boat in Semiconductor Chip Processing

Key word: Ceramic wafer carrier

To reduce and/or eliminate damage to wafers during the process steps and during transport to and from the various devices, the wafers are carried on carrier devices or “Ceramic wafer carrier ”. The wafer boats are necessarily subjected to the same corrosive chemicals and/or high temperatures under which the wafers are processed. In addition, after wafer processing, the wafer boats are themselves subjected to chemical cleaning processes to remove any particulates and/or other impurities to avoid contamination of any subsequent wafer batches.

• Formats of various Ceramic wafer carrier are well know in the art and may differ depending on the size and nature of the wafer (e.g., diameters ranging from 100 mm to 500 mm and thicknesses of about 0.15 to about 1.5 mm) and/or the structures of the processing equipment into which the wafers are placed. For example, horizontal wafer boats are used in processes that involve horizontal oxidation furnaces, and vertical wafer boats in processes that involve vertical furnaces.
• In conventional practice, a Ceramic wafer carrier is fabricated from a single material. In part this had been considered necessary to eliminate the possibility of a high movement of tolerances under the extreme temperature and chemical conditions, which would result in damage to the boat and/or, more significantly, cause damage to the wafers that are carried on the boat.

Ceramic wafer carrier is a loader which can be inserted by silicon wafer. So it is applied in semiconductor area. The cleaning process for quartz boat is very strictly. The boat should be dipped in concentration of 4-5% HF solutions keeped for 4 hours. Then soaked in DI water for 1 hours. Quartz boat, Robuster supplys, can be washed as semicondutor's requirement. We have our own cleaning room.

Robuster supply Ceramic wafer carrier whose degree and diameter can be customized according to customer requirements

1,quartz boat for GaAs semiconductor material

2,purity 99.95% min

3,super tight dimensional tolerance

4,nice appearance

Mingrui Manufacture zirconia Ceramic wafer carrier used on automatic wafer handling system diffusion furnace . As zirconia ceramic with the charactheristic of wear resistant , high temperature resistant,

Ceramic wafer carrier is a good choice for wafter carrier .

Integrated wafer loading& unloading, unloading the diffused wafers from the Ceramic wafer carrier

Technical Characteristics

·With continuous wafer loading& unloading can guarantee the continuous production. Or be used only for wafer loading or unloading is also available.

·With perfect detection and alarm system which guarantees the stable and automatic operation.

·With circulation method of the cassette baseplate which reduce the labor intensity.

·Modular control program structure, highly repeatable and readable, which is convenient for function expansion in future and maintenance;

·With recipe data design which enables the equipment to work with various kinds of Ceramic Quartz Boat with different accuracy, while running equipment will follow the boat No. automatically and retrieve the corresponding recipe data without human intervention.

prameter :

Zirconia ceramic date sheet :

Industrial Ceramic Intriduction

Aluminium Oxide, Al2O3 is the most widely applied and cost effective technical ceramic material. It offers a combination of superior mechanical strength and electrical properties, wear resistance and corrosion resistance. The maximum working temperature is up to 1700 °C with relatively high thermal conductivity. It is also an electrically insulating material with a high electrical resistivity. The good corrosion resistance makes it insoluble in water and slightly soluble in strong acid and alkaline solution.

Company Introduction
Mingrui ceramic manufacture and provides alumina ceramic components for a wide range of application like Mechanical Equipment, Electronic & Electrical, Oil Drilling, Medical, Chemical Industry etc. According to actual application and customer's requirement, the purities vary from 95%-99.7% and the forming methods will be different. The forming methods applied in our plant include dry pressing, isostatic pressing, injection moulding, extrusion moulding. With experienced engineers and talented workers, we are confident to offer high quality, high precision, complex components for customers worldwide.

Mingrui Ceramics has years of experience designing and developing technical ceramic solutions for a wide variety of applications and industries. High Temperature Refractory Machining Ceramic Parts Laser Equipment. We offer this expertise to all of our customers to ensure the best design and materials are chosen for their specific application and needs. High Temperature Refractory Machining Ceramic Parts Laser Equipment, Typically, our custom technical ceramic components and parts we supply are used for one of three main reasons:

FAQ

Q: Are you trading company or manufacturer ?

A: We are factory.

Q: How long is your delivery time?

A: Generally it is 5-10 days if the goods are in stock. or it is 15-20 days if the goods are not in stock, it is according to quantity.

Q: Do you provide samples ? is it free or extra ?

A: Yes, we could offer the sample for free charge but do not pay the cost of freight.

Q: What is your terms of payment ?

A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.

If you have any other question, pls feel free to contact us .