Dongguan Ming Rui Ceramic Technology Co.,ltd
Dongguan Ming Rui Ceramic Technology Co., Ltd
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High Heat Resistant Ceramic Vacuum Adsorption Chucking for Wafer Transportation
Key word: Ceramic Vacuum Adsorption Chucking
Mingrui offers ultra-flat ceramic vacuum wafer chucks (Figure 1) for improved yield management in semiconductor wafer processing. Low-surface-contact configurations reduce the risk of back-side particles, which have negative impact on wafer geometry in precision applications. The company offers:
Heat-resistant, non-damaging handling arms provide high functionality.
A heat-resistant, damageless handling arm. We can apply coatings such as Diamond Like Carbon (DLC) to the ceramic surface for enhanced functionality that mitigates damage to wafers / glass panels and prevents contamination from diffusing.
Products : Ceramic Chucks and wafer end-effectors
Ceramic Chucks and end-effectors are used to manipulate and carry silicon wafers through the whole production process. The chemical inertness of ceramics allows those components to be contamination-free for the wafer in particular in chemical wet etching baths.
These items enable the handling of large-size wafers and can be designed with vacuum channels in order to hold the part.
Mingrui Ceramic can offer the following products :
Ceramic wafer suction plate play a key role on the wafer transfer equipment as automatic wafer unloader and wafer loader machinery .
LPCVD ceramic wafer vaccum suction plate are mainly used in the solar semiconductor thin film making , like the diffussion wafer load and unload machine . It used for wafer loading and unloading .
A heat-resistant, damageless handling arm. We can apply coatings such as Diamond Like Carbon (DLC) to the ceramic surface for enhanced functionality that mitigates damage to wafers / glass panels and prevents contamination from diffusing.
Mingrui Manufacture zirconia Ceramic wafer boat used on automatic wafer handling system diffusion furnace . As zirconia ceramic with the charactheristic of wear resistant , high temperature resistant,
ceramic wafer boat is a good choice for wafter carrier .
Integrated wafer loading& unloading, unloading the diffused wafers from the ceramic wafer boat
Technical Characteristics
·With continuous wafer loading& unloading can guarantee the continuous production. Or be used only for wafer loading or unloading is also available.
·With perfect detection and alarm system which guarantees the stable and automatic operation.
·With circulation method of the cassette baseplate which reduce the labor intensity.
·Modular control program structure, highly repeatable and readable, which is convenient for function expansion in future and maintenance;
·With recipe data design which enables the equipment to work with various kinds of ceramic wafer boat with different accuracy, while running equipment will follow the boat No. automatically and retrieve the corresponding recipe data without human intervention.
prameter :
Zirconia ceramic date sheet :
| Properties | Units | 95 Alumina | 99 Alumina | ZrO2 |
| Density | g / cm³ | 3.65 | 3.92 | 5.95-6.0g/cm³ |
| Water absorption | % | 0 | 0 | 0 |
| Coefficient of thermal expansion | 10-6/K | 7.9 | 8.5 | 10.5 |
| Modulus of Elasticity Young's Mod | GPa | 280 | 340 | 210 |
| Poisson's ratio | / | 0.21 | 0.22 | 0.3 |
| HV Hardness HV | MPa | 1400 | 1650 | 1300-1365 |
| Flexural Strength @ room temperature | MPa | 280 | 310 | 950 |
| Flexural Strength @700°C | MPa | 220 | 230 | 210 |
| Compressive Strength @ room temperature | MPa | 2000 | 2200 | 2000 |
| Fracture Toughness | MPa *m 1/2 | 3.8 | 4.2 | 10 |
| Heat conductivity @ room temperature | W/ m*k | 18-25 | 26-30 | 2-2.2 |
| Electrical Resistivity @ room temperature | Ω*mm2 /m | >1015 | >1016 | >1015 |
| Max use temperature | °C | 1500 | 1750 | 1050 |
| Resistance to acid alkaline | / | high | high | high |
| Dielectric Constant | / | 9.5 | 9.8 | 26 |
| Dielectric Strength | KV/mm | 16 | 22 | / |
| Thermol Shock Resistance | △ T ( °C ) | 220 | 180-200 | 280-350 |
| Tensile Strength @ 25 °C | MPa | 200 | 248 | 252 |
To see how we can assist you with your semiconductor industry , contact us today.
Industrial Ceramic Intriduction
Aluminium Oxide, Al2O3 is the most widely applied and cost effective technical ceramic material. It offers a combination of superior mechanical strength and electrical properties, wear resistance and corrosion resistance. The maximum working temperature is up to 1700 °C with relatively high thermal conductivity. It is also an electrically insulating material with a high electrical resistivity. The good corrosion resistance makes it insoluble in water and slightly soluble in strong acid and alkaline solution.
Company Introduction
Mingrui ceramic manufacture and provides alumina ceramic components for a wide range of application like Mechanical Equipment, Electronic & Electrical, Oil Drilling, Medical, Chemical Industry etc. According to actual application and customer's requirement, the purities vary from 95%-99.7% and the forming methods will be different. The forming methods applied in our plant include dry pressing, isostatic pressing, injection moulding, extrusion moulding. With experienced engineers and talented workers, we are confident to offer high quality, high precision, complex components for customers worldwide.
Mingrui Ceramics has years of experience designing and developing technical ceramic solutions for a wide variety of applications and industries. High Temperature Refractory Machining Ceramic Parts Laser Equipment. We offer this expertise to all of our customers to ensure the best design and materials are chosen for their specific application and needs. High Temperature Refractory Machining Ceramic Parts Laser Equipment, Typically, our custom technical ceramic components and parts we supply are used for one of three main reasons:
FAQ
Q: Are you trading company or manufacturer ?
A: We are factory.
Q: How long is your delivery time?
A: Generally it is 5-10 days if the goods are in stock. or it is 15-20 days if the goods are not in stock, it is according to quantity.
Q: Do you provide samples ? is it free or extra ?
A: Yes, we could offer the sample for free charge but do not pay the cost of freight.
Q: What is your terms of payment ?
A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.
If you have any other question, pls feel free to contact us .