Dongguan Ming Rui Ceramic Technology Co.,ltd
Dongguan Ming Rui Ceramic Technology Co., Ltd
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High Temperature Resistant Alumina Ceramic Vertical Wafer Boat with 25 pcs Wafer Slot
Key words : Alumina Ceramic Vertical Wafer Boat
A wafer boat for supporting silicon wafers. The wafer boat includes a ceramic body having at least one wafer support structure sized to support a silicon wafer thereon. A ceramic coating is disposed on a surface of the wafer slot. The ceramic coating has an impurity migration preventing thickness and a wafer contact surface. The wafer contact surface has a post coating surface finish, which substantially prevents slip in the silicon wafers.
Alumina Ceramic Wafer Boat
The increasing size of silicon wafers is one of the most obvious trends in silicon material technology. Presently, 300mm diameter wafers are expected to ultimately replace most 150 mm and 200 mm wafer applications. It is also predicted that 400 mm wafers will probably be introduced in the not too distant future. The use of larger diameter wafers for maintaining productivity presents several major challenges to semiconductor manufactures. For example, facilities with equipment capable of handling the larger wafers, e.g., vertical furnaces, must be built. New patterning techniques must be developed to print smaller feature sizes over larger areas. The larger wafers must also be thicker to increase their resistance to warping and other structural deformations. Moreover, the larger wafers are also heavier, requiring the use of automated wafer transport systems.
Ceramic Wafer Boat Features:
| Unit | 95% Al2O3 | 99% Al2O3 | ZrO2 | GP-Si3N4 | |
| Color | - | white | ivory | white | gray |
| Density | g/cm³ | 3.70 | 3.90 | 6.04 | 3.31 |
| Water Absorption | % | 0 | 0 | 0 | 0 |
| Young's Modulus | Gpa | 280 | 350 | 205 | 295 |
| Vickers Hardness | Gpa | 14 | 20 | 12 | 18-20 |
| Flexural Strength ( at R.T. ) | Mpa | 280 | 300 | 900 | 650 |
| Compressive Strength ( at R.T. ) | Mpa | 2000 | 2500 | 2200 | 2200 |
| Thermal Conductivity ( at R.T. ) | W/(m.K) | 18-25 | 30 | 2.2 | 25 |
| Thermal Shock Resistance | ΔT(°C) | 220 | 180-200 | 280-350 | 450-650 |
| Max. Working Temperature ( at R.T. ) | °C | 1500 | 1700 | 800 | 1200 |
| Volume Resistivity ( at R.T. ) | Ω.cm | >10^15 | >10^14 | >10^12 | >10^14 |
| Dielectric Constant (1 MHz at R.T. ) | - | 9.50 | 9.80 | 26 | 8.20 |
| Dielectric Strength | kV/mm | 16 | 22 | - | 16 |
Typical Characteristics Rotor: Outside diameter: < 30,00 mm ( 1.18") Thickness: < 7,00 mm ( . 28") Groove(s) dimensions: Width > 0,051 mm ( .0002") Depth > 0,13 mm ( .0052") Length > 2,00 mm ( .0780") Stator: Outside diameter: < 30,00 mm ( 1.18") Thickness: < 7,00 mm ( . 28") Hole diameter: > 0,22 mm x 0,25 mm (.008" x .010") Surface finish, Rotor or Stator Zirconia: 0,025 m (1 in) or N1 Alumina 99,9 %: 0,05 m (2 in) or N2 Alumina 96% or 99,7%: 0,1 to 0,2 m (4 to 8 in) or N3 to N4
Advantage of Ceramic Wafer Boat
1. Isostatic pressed.
2. Fire resistance.
3. Superior mechnical strength.
4. High corrosion and wear resistance.
5. High Temperature Resistance.
6. Good Insulation Performance Precision.
7. Zirconia and alumina ceramic material.
They are high corrosion and wear resistance and strong impact resistance and delivers 10 times longer working life than metal plunger. They give a longer life to the sealed packing material.
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Packaging and Shipping
Packed in PP bag or sponge tray, then put in standard export carton packing, or OEM packing.
Shipped by Air ( DHL, TNT, UPS, Fedex, EMS ), or Sea transportation.
Company information
Who Are We?
Mingrui is a professional factory with years OEM experience in manufacturing industrial ceramic parts.
What Do We Do?
We produce (OEM ) strengthened structure zirconia and alumina ceramic rod,tube, shaft, plate, sleeve, valve, plunger, bearing, nozzle and ceramic arm, they are applicable to instruments, medical instruments, clocks and electronic products, mills, energy and power, machine and metals, autocar and military, spaceflight and some other high-end fields.
All of our products with certificates, such as , CE, TUV, and so on.
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