Dongguan Ming Rui Ceramic Technology Co.,ltd
Dongguan Ming Rui Ceramic Technology Co., Ltd
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Ceramic End - Effectors, Endeffector, Endeffectors, Wafer Carrier, Wafer Chuck, Wafer Pick - Up Tools, Wafer Tools: NetMotion, Inc. web site
| Ceramics have superior mechanical, electrical, and thermal properties ideal for quality components. the durability of fine ceramics makes it ideal for mechanical and thermal loads that are abrasive and in chemically harsh environment. | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| Standard 12" and 8" Coated Alumina End-Effectors | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| Properties & Application Note | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| Application Note | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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End effectors constitute the end of the robot arm which handles and moves the semiconductor wafer between positions. It’s basically the robot’s hand so it is important that it be thermally and dimensionally stable and not contaminate the chamber with particles or chemical contaminants.
Ceramic end effectors are used for their stiffness and high strength, meaning the robot arm settles to its final position faster than with aluminium. Additionally, the robot’s motion itself is faster, optimising positioning accuracy and increasing efficiency.
The ceramic material is chosen based on the deposition chemistry to which it will be exposed. For example, if plasma is used, a minimum 99.5% alumina must be used.
The same consideration of gas chemistry is needed for determining the interior materials for plasma etch processes. If an anodised aluminium or alumina chamber is used with fluorinated gases or oxygen plasma then an yttria coating may be used on theanodised aluminium walls to prevent chemical attack. Yttria has superior erosion resistance and low particulation compared with alumina or thermal spray alumina coating.
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Industrial Ceramic Intriduction
Aluminium Oxide, Al2O3 is the most widely applied and cost effective technical ceramic material. It offers a combination of superior mechanical strength and electrical properties, wear resistance and corrosion resistance. The maximum working temperature is up to 1700 °C with relatively high thermal conductivity. It is also an electrically insulating material with a high electrical resistivity. The good corrosion resistance makes it insoluble in water and slightly soluble in strong acid and alkaline solution.
Company Introduction
Mingrui ceramic manufacture and provides alumina ceramic components for a wide range of application like Mechanical Equipment, Electronic & Electrical, Oil Drilling, Medical, Chemical Industry etc. According to actual application and customer's requirement, the purities vary from 95%-99.7% and the forming methods will be different. The forming methods applied in our plant include dry pressing, isostatic pressing, injection moulding, extrusion moulding. With experienced engineers and talented workers, we are confident to offer high quality, high precision, complex components for customers worldwide.
FAQ
Q: Are you trading company or manufacturer ?
A: We are factory.
Q: How long is your delivery time?
A: Generally it is 5-10 days if the goods are in stock. or it is 15-20 days if the goods are not in stock, it is according to quantity.
Q: Do you provide samples ? is it free or extra ?
A: Yes, we could offer the sample for free charge but do not pay the cost of freight.
Q: What is your terms of payment ?
A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.
If you have any other question, pls feel free to contact us .